Micro- and nanoresonators have important applications including sensing, navigation, and biochemical detection. Their performance is quantified using the quality factor Q, which gives the ratio of the energy stored to the energy dissipated per cycle. Metallic glasses are a promising material class for micro- and nanoscale resonators since they are amorphous and can be fabricated precisely into complex shapes on these length scales. To understand the intrinsic dissipation mechanisms that ultimately limit large Q-values in metallic glasses, we perform molecular dynamics simulations to model metallic glass resonators subjected to bending vibrations at low temperatures. We calculate the power spectrum of the kinetic energy, redistribution of energy from the fundamental mode of vibration, and Q vs the kinetic energy per atom K of the excitation. In the harmonic and anharmonic response regimes where there are no atomic rearrangements, we find that Q -> infinity over the time periods we consider (since we do not consider coupling to the environment). We identify a characteristic K-r above which atomic rearrangements occur, and there is significant energy leakage from the fundamental mode to higher frequencies, causing finite Q. Thus, K-r is a critical parameter determining resonator performance. We show that K-r decreases as a power-law, K-r similar to N-k, with increasing system size N, where k approximate to 1.3. We estimate the critical strain similar to 10(-8) for micrometer-sized resonators below which atomic rearrangements do not occur in the millikelvin temperature range, and thus, large Q-values can be obtained when they are operated below gamma(r). We also find that K-r for amorphous resonators is comparable to that for resonators with crystalline order.
